1.1. Product introduction

The automatic filling system consists of five parts: software system, PLC control system, gas distribution system, vacuum system and detection system.

A. Software systems

According to the user's requirements and the characteristics of system flow control, customize the software.

B. PLC control system

PLC system is used to connect the gas distribution system, vacuum system, booster system and detection system. So that they can work together and run reliably. It is easy to implement chain protection.

Manual switch control and software control can be realized at the same time.

C. Valve distribution system

The main components are high precision MFC. The controller integrates gas measurement function and flow control function, and integrates closed-loop PID control. The gas source end is equipped with multi-branch confluence drains and pressure relief valves. It can switch cylinders online.

Considering the safety factors, the solenoid valve is designed in the system pipeline. When the system fails or the configuration exceeds the set conditions, the gas source pipeline is cut off automatically to ensure the system safety. At the same time, the accuracy of gas distribution is ensured.

D. Vacuum system

Two-stage rotary vane vacuum pump is selected. The ultimate vacuum degree can reach 6*10-2 Pa and the flow rate is 4 l/s.

E. Detection System

It mainly includes on-line detection of system gas and exhaust pressure. Fault signals of flow rate, compressor and vacuum pump in gas distribution system

1.2. Technical parameter